JPH0234429B2 - - Google Patents

Info

Publication number
JPH0234429B2
JPH0234429B2 JP59034774A JP3477484A JPH0234429B2 JP H0234429 B2 JPH0234429 B2 JP H0234429B2 JP 59034774 A JP59034774 A JP 59034774A JP 3477484 A JP3477484 A JP 3477484A JP H0234429 B2 JPH0234429 B2 JP H0234429B2
Authority
JP
Japan
Prior art keywords
ion
ions
magnetic field
sample
deflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59034774A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60180050A (ja
Inventor
Hideo Kusanagi
Teruyasu Pponma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denryoku Chuo Kenkyusho
Nippon Telegraph and Telephone Corp
Original Assignee
Denryoku Chuo Kenkyusho
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denryoku Chuo Kenkyusho, Nippon Telegraph and Telephone Corp filed Critical Denryoku Chuo Kenkyusho
Priority to JP59034774A priority Critical patent/JPS60180050A/ja
Publication of JPS60180050A publication Critical patent/JPS60180050A/ja
Publication of JPH0234429B2 publication Critical patent/JPH0234429B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP59034774A 1984-02-24 1984-02-24 イオン照射装置 Granted JPS60180050A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59034774A JPS60180050A (ja) 1984-02-24 1984-02-24 イオン照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59034774A JPS60180050A (ja) 1984-02-24 1984-02-24 イオン照射装置

Publications (2)

Publication Number Publication Date
JPS60180050A JPS60180050A (ja) 1985-09-13
JPH0234429B2 true JPH0234429B2 (en]) 1990-08-03

Family

ID=12423641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59034774A Granted JPS60180050A (ja) 1984-02-24 1984-02-24 イオン照射装置

Country Status (1)

Country Link
JP (1) JPS60180050A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0665015B2 (ja) * 1987-05-22 1994-08-22 日本電子株式会社 電子顕微鏡

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5934775A (ja) * 1982-08-23 1984-02-25 Matsushita Electric Ind Co Ltd 回転ヘツド型磁気録画再生装置

Also Published As

Publication number Publication date
JPS60180050A (ja) 1985-09-13

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